Proton exchange furnace
Product Overview
Based on a dual-temperature zone collaborative mechanism, it realizes proton exchange reaction in optical materials such as lithium niobate, forming a low-loss integrated optical waveguide structure to support the manufacturing of high-speed photonic devices.
Product Features
Dual-tube vertical compact structure: Saves space while supporting parallel operation of dual processes, improving efficiency.
High-precision temperature uniformity control: Precise temperature control of the heat treatment process is achieved based on the characteristics of materials such as lithium niobate.
Automated process management: The equipment integrates an intelligent system, adapting to the high-environmental requirements of the proton exchange process.
Technical Specifications
Wafer size: 4 inches (compatible with 3 inches, 2 inches)
Temperature range: 200°C-300°C
Constant temperature zone length and accuracy: ≤1°C/300mm
Applicable materials: Lithium niobate
Application Scenarios
Applicable materials: 4-inch and smaller lithium niobate wafers.
Applicable processes: Proton exchange process (200℃-300℃), material heat treatment with high environmental requirements.
Applicable fields: Optoelectronic devices, sensor substrate material processing.
Product Category
Industrial version
Keyword
EXWELL
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