Products and Solutions

Provide a full process equipment solution from device research and development to mass production

Industrial version

Research version

12-inch Vertical High-Temperature Oxidation Annealing Furnace

Meeting the specifications for 12-inch wafers, this process is used to form a clean, dense SiO2 film layer on silicon substrates; it is applied in devices such as CMOS, IGBT, and MEMS, often serving as an isolation layer, buffer layer, masking layer, or sacrificial layer.

Details >

VCSEL wet oxidation furnace

A wet oxidation process was developed specifically for VCSEL devices to create a dense optical confinement layer and an electrical insulation structure; simultaneously compatible with general wafer surface passivation treatment to meet the dual process requirements of optoelectronic and semiconductor devices.

Details >

High-temperature oxidation furnace

Used to form a clean and dense SiO2 film layer on a silicon substrate;
It is applied to devices such as CMOS, IGBT, and MEMS, and is often used as an isolation layer, buffer layer, masking layer, sacrificial layer, etc.

Details >

Vertical LPCVD

Low-pressure chemical vapor deposition technology is adopted to grow functional films such as silicon nitride and doped polycrystalline silicon on the substrate surface, which is often applied in product fields such as semiconductors, optoelectronics, MEMS, and solar cells.

Details >

SiC high-temperature activation furnace

Customized for silicon carbide power devices, this process repairs ion implantation lattice damage and activates dopant impurities through ultra-high-temperature annealing, optimizing the electrical performance of automotive-grade devices.

Details >

Proton exchange furnace

Based on a dual-temperature zone collaborative mechanism, proton exchange reaction is achieved in optical materials such as lithium niobate to form a low-loss integrated optical waveguide structure, supporting the manufacturing of high-speed photonic devices

Details >

< 1 2 >

Service hotline:

+86 0731-88376310

Address: No. 858, Purui West Road, Wangcheng Economic and Technological Development Zone, Changsha City

WeChat official account

Douyin QR code

Online consultation

Business license

This site supports IPv4 and IPv6 dual-access

COOKIES

Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy

COOKIES

required

These cookies are necessary for basic functions such as payment. Standard cookies cannot be turned off and do not store any of your information.

analyze

These cookies collect information, such as how many people are using our site or which pages are popular, to help us improve the customer experience. Turning these cookies off will mean we can't collect information to improve your experience.

Feature

These cookies enable the website to provide enhanced functionality and personalization. They may be set by us or by third-party providers whose services we have added to our pages. If you do not allow these cookies, some or all of these services may not function properly.

advertise

These cookies help us understand what you are interested in so that we can show you relevant advertising on other websites. Turning these cookies off will mean we are unable to show you any personalized advertising.